reactive sputtering的意思
reactive sputtering中文翻譯:
[電子]反應濺射法
sputtering economy───經濟低迷
non reactive───adj.[化學]不反應的;無電抗的
reactive power───[電]無功功率
reactive oxygen species───n.活性氧;[醫]活性氧簇
Through the technology of RF and DC reactive sputtering manufacture, H2S gas sensors have been developed on silicon substrate on which a heater made of Pt were attached.───通過交流和直流反應濺射,我們以硅基片(表面上有白金加熱電極)為基底制作H_2S氣敏元件。
A novel kinetics model for dc reactive sputtering was proposed.───提出了一個新的直流反應濺動力學模型。
For reactive sputtering, the gradient films with varying ratio of chemical component can be prepared by changing gas flow rate continuously.───對于反應濺射,可通過連續改變反應氣體流量制得化學成分比連續變化的梯度薄膜。
Effect of Technical Parameters on Deposition Rate of AlN Films Prepared by Magnetron Reactive Sputtering───工藝參數對磁控反應濺射AlN薄膜沉積速率的影響
Study on Particle Transport Near the Target Surface in Reactive Sputtering───反應濺射中靶面附近的粒子輸運研究
Influence of Substrate Temperature and Nitrogen Gas on Zinc Nitride Thin Films Prepared by RF Reactive Sputtering───襯底溫度和氮氣分壓對氮化鋅薄膜的性能影響
AlN Piezoelectric Thin Film Prepared by Reactive Magnetron Reactive Sputtering───襯底溫度對反應磁控濺射制備AlN壓電薄膜的影響
Influence of Nitrogen Partial Pressure on Zirconium Nitride Films Grown by DC Reactive Sputtering───直流濺射中氮氣分量對氮化鋯薄膜性質的影響
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